ausblenden:
Schlagwörter:
Ion probe; Particle induced X-ray emission (PIXE); Rutherford backscattering spectrometry (RBS); Thin films
Zusammenfassung:
This contribution deals with the morphological and elemental characterisation with high--energy (MeV) focused ion beams (in particular protons) with special emphasis on high spatial resolution in the sub--micrometer regime and very low...