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  Suitable test structures for submicron ion beam analysis

Spemann, D., Reinert, T., Vogt, J., Dobrev, D., & Butz, T. (2002). Suitable test structures for submicron ion beam analysis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 190(1-4), 312-317. doi:10.1016/S0168-583X(01)01253-8.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0004-C572-D Version Permalink: https://hdl.handle.net/21.11116/0000-0004-C573-C
Genre: Journal Article

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 Creators:
Spemann, D.1, Author
Reinert, Tilo1, Author           
Vogt, J.1, Author
Dobrev, D.2, Author
Butz, T.1, Author
Affiliations:
1Nukleare Festkörperphysik, Fakultät für Physik und Geowissenschaften, University of Leipzig, Germany, ou_persistent22              
2Gesellschaft für Schwerionenforschung mbH, Darmstadt, Germany, ou_persistent22              

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Free keywords: Test sample; Semiconductor heterostructure; Nanowhisker; Submicron beam spot sizes; Submicron beam spot shape
 Abstract: For the precise determination of the sizes of submicron beam spots test structures with an excellent edge definition are required. For this purpose a semiconductor heterostructure consisting of an 1.62 @mm GaInP epi--layer grown on (001)...

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Language(s): eng - English
 Dates: 2002-01-152002-05
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1016/S0168-583X(01)01253-8
BibTex Citekey: Spemann:2002
 Degree: -

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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  Abbreviation : NIM B
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Amsterdam : Elsevier B.V.
Pages: - Volume / Issue: 190 (1-4) Sequence Number: - Start / End Page: 312 - 317 Identifier: ISSN: 0168-583X
CoNE: https://pure.mpg.de/cone/journals/resource/954925484704