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  Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering plasma with an aluminum target

Iglesias, E. J., Hecimovic, A., Mitschker, F., Fiebrandt, M., Bibinov, N., & Awakowicz, P. (2020). Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering plasma with an aluminum target. Journal of Physics D: Applied Physics, 53: 055202. doi:10.1088/1361-6463/ab52f8.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0005-5A70-8 Version Permalink: http://hdl.handle.net/21.11116/0000-0005-8C9F-B
Genre: Journal Article

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https://doi.org/10.1088/1361-6463/ab52f8 (Publisher version)
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 Creators:
Iglesias, E. J.1, Author
Hecimovic, A.1, 2, Author              
Mitschker, F.1, Author
Fiebrandt, M.1, Author
Bibinov, N.1, Author
Awakowicz, P.1, Author
Affiliations:
1External Organizations, ou_persistent22              
2ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856290              

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Language(s): eng - English
 Dates: 2020
 Publication Status: Published in print
 Pages: 12 p.
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: DOI: 10.1088/1361-6463/ab52f8
 Degree: -

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Title: Journal of Physics D: Applied Physics
  Abbreviation : J. Phys. D: Appl. Phys.
Source Genre: Journal
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Publ. Info: Bristol : IOP Publishing
Pages: - Volume / Issue: 53 Sequence Number: 055202 Start / End Page: - Identifier: ISSN: 0022-3727
CoNE: https://pure.mpg.de/cone/journals/resource/0022-3727