Epitaxial silicide growth on Si(001)

Falke, M; Mogilatenko, A; Filonenko, O; Henning, A; Teichert, T; Beddies, G; Hinneberg, HJ; Humphreys, C

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Epitaxial silicide growth on Si(001)

Falke, M., Mogilatenko, A., Filonenko, O., Henning, A., Teichert, T., Beddies, G., et al. (2003). Epitaxial silicide growth on Si(001). In 15th International Conference on Electron Microscopy (ICEM 2003).

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Item Permalink: https://hdl.handle.net/21.11116/0000-0005-7EEC-5 Version Permalink: https://hdl.handle.net/21.11116/0000-0005-7EED-4

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Falke, M, Author
Mogilatenko, A, Author
Filonenko, O, Author
Henning, A¹, Author
Teichert, T, Author
Beddies, G, Author
Hinneberg, HJ, Author
Humphreys, C, Author

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1External Organizations, ou_persistent22

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Dates: Published Online: 2003-09

Publication Status: Published online

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Title: 15th International Conference on Electron Microscopy (ICEM 2003)

Place of Event: Durban, South Africa

Start-/End Date: 2003-09-01 - 2003-09-06

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Title: 15th International Conference on Electron Microscopy (ICEM 2003)

Source Genre: Proceedings

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