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  Epitaxial silicide growth on Si(001)

Falke, M., Mogilatenko, A., Filonenko, O., Henning, A., Teichert, T., Beddies, G., et al. (2003). Epitaxial silicide growth on Si(001). In 15th International Conference on Electron Microscopy (ICEM 2003).

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 Creators:
Falke, M, Author
Mogilatenko, A, Author
Filonenko, O, Author
Henning, A1, Author              
Teichert, T, Author
Beddies, G, Author
Hinneberg, HJ, Author
Humphreys, C, Author
Affiliations:
1External Organizations, ou_persistent22              

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 Dates: 2003-09
 Publication Status: Published online
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Title: 15th International Conference on Electron Microscopy (ICEM 2003)
Place of Event: Durban, South Africa
Start-/End Date: 2003-09-01 - 2003-09-06

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Title: 15th International Conference on Electron Microscopy (ICEM 2003)
Source Genre: Proceedings
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