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  Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors

Abdelhameed, A. H., Angloher, G., Bauer, P., Bento, A., Bertoldo, E., Canonica, L., et al. (2020). Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors. Journal of Low Temperature Physics, 199(1-2), 401-407. doi:10.1007/s10909-020-02357-x.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0005-C55B-7 Version Permalink: http://hdl.handle.net/21.11116/0000-0006-1013-2
Genre: Journal Article

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https://doi.org/10.1007/s10909-020-02357-x (Publisher version)
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 Creators:
Abdelhameed, A. H.1, Author
Angloher, G.1, Author
Bauer, P.1, Author
Bento, A.1, Author
Bertoldo, E.1, Author
Canonica, L.1, Author
Fuchs, D.1, Author
Hauff, D.1, Author
Ferreiro Iachellini, N.1, Author
Mancuso, M.1, Author
Petricca, F.1, Author
Pröbst, F.1, Author
Riesch, J.2, Author              
Rothe, J.1, Author
Affiliations:
1External Organizations, ou_persistent22              
2Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327              

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Free keywords: Konferenzbeitrag
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Language(s): eng - English
 Dates: 20192020
 Publication Status: Published online
 Pages: 7 p.
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1007/s10909-020-02357-x
 Degree: -

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Title: Journal of Low Temperature Physics
  Subtitle : 18th International Workshop on Low Temperature Detectors (LTD-18), Milano, 2019-07-22 to 2019-07-26
Source Genre: Journal
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Publ. Info: London : Springer Nature
Pages: - Volume / Issue: 199 (1-2) Sequence Number: - Start / End Page: 401 - 407 Identifier: ISSN: 0022-2291
CoNE: https://pure.mpg.de/cone/journals/resource/954925414929