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  EUV spectroscopy of Sn5+ –Sn10+ ions in an electron beam ion trap and laser-produced plasmas

Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., et al. (2020). EUV spectroscopy of Sn5+ –Sn10+ ions in an electron beam ion trap and laser-produced plasmas. Journal of Physics B: Atomic, Molecular and Optical Physics, 53: 195001. doi:10.1088/1361-6455/aba3a8.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0006-E5A4-E Version Permalink: http://hdl.handle.net/21.11116/0000-0006-E5A5-D
Genre: Journal Article

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 Creators:
Bouza, Z., Author
Scheers, J., Author
Ryabtsev, A., Author
Schupp, R., Author
Behnke, L., Author
Shah, Chintan1, Author              
Sheil, J., Author
Bayraktar, M., Author
Crespo López Urrutia, J. R.1, Author              
Ubachs, W., Author
Hoekstra, R., Author
Versolato, O. O., Author
Affiliations:
1Division Prof. Dr. Thomas Pfeifer, MPI for Nuclear Physics, Max Planck Society, ou_2025284              

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 Abstract: Emission spectra from multiply-charged Sn5+ –Sn10+ions are recorded from an electron beam ion trap (EBIT) and from laser-produced plasma (LPP) in the extreme ultraviolet range relevant for nanolithographic applications. Features in the wavelength regime between 12.6 and 20.8 nm are studied. Using the Cowan code, emission line features of the charge-state-resolved Sn ion spectra obtained from the EBIT are identified. Emission features from tin LPP either from a liquid micro-droplet or planar solid target are subsequently identified and assigned to specific charge states using the EBIT data. For the planar solid tin target, the 4d–5p transitions of Sn8+ –Sn10+ions are shown to dominate the long-wavelength part of the measured spectrum and transitions of type 4d–4f + 4p–4d are visible in absorption. For the droplet target case, a clear increase in the charge state distribution with increasing laser intensity is observed. This qualitatively demonstrates the potential of using long-wavelength out-of-band emission features to probe the charge states contributing to the strong unresolved transition array at 13.5 nm relevant for nanolithography.

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 Dates: 2020-08-12
 Publication Status: Published online
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1088/1361-6455/aba3a8
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Title: Journal of Physics B: Atomic, Molecular and Optical Physics
Source Genre: Journal
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Publ. Info: Bristol : IOP Publishing
Pages: - Volume / Issue: 53 Sequence Number: 195001 Start / End Page: - Identifier: ISSN: 0022-3700
ISSN: 1361-6455
CoNE: https://pure.mpg.de/cone/journals/resource/0022-3700