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  Design and performance of a VUV ellipsometer

Johnson, R. L., Barth, J., Cardona, M., Fuchs, D., & Bradshaw, A. M. (1990). Design and performance of a VUV ellipsometer. Nuclear Instruments and Methods in Physics Research Section A, 290(2-3), 606-612. doi:10.1016/0168-9002(90)90582-Q.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0007-0A09-5 Version Permalink: http://hdl.handle.net/21.11116/0000-0007-0A0B-3
Genre: Journal Article

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 Creators:
Johnson, Robert L.1, Author
Barth, Jochen2, Author
Cardona, Manuel1, Author
Fuchs, Detlef3, Author              
Bradshaw, Alexander M.3, Author              
Affiliations:
1II. Institut für Experimentalphysik, Universität Hamburg, Luruper Chaussee 149, D-2000 Hamburg 50, FRG, ou_persistent22              
2Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, D-7000 Stuttgart 80, FRG, ou_persistent22              
3Fritz Haber Institute, Max Planck Society, ou_24021              

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 Abstract: Spectroscopic ellipsometry provides a rapid, precise and direct measurement of both real and imaginary parts of the dielectric function from bulk materials and thin films. The technique is used routinely in the NIR-VIS-UV spectral region to determine the optical constants of solids over the photon energy range 1.5–5.0 eV. By making use of synchrotron radiation with its high degree of linear polarization and triple-reflection polarizers we have built a new automated instrument which extends the spectral range of spectroscopic ellipsometry up to 35 eV. Our instrument is ideal for investigating the band structure of wide-band-gap semiconductors and insulators and can also be used to measure the excitonic structures arising from transitions from shallow core levels. In this paper the design of the instrument is described and the factors that limit the ultimate performance are analyzed.

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Language(s): eng - English
 Dates: 1989-12-011990-05-10
 Publication Status: Published in print
 Pages: 7
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1016/0168-9002(90)90582-Q
 Degree: -

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Title: Nuclear Instruments and Methods in Physics Research Section A
Source Genre: Journal
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Publ. Info: Amsterdam : Elsevier B.V.
Pages: 7 Volume / Issue: 290 (2-3) Sequence Number: - Start / End Page: 606 - 612 Identifier: ISSN: 0168-9002
CoNE: https://pure.mpg.de/cone/journals/resource/954925485716