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  In situ x-ray diffraction and spectro-microscopic study of ALD protected copper films

Dogan, G., Sanli, U. T., Hahn, K., Müller, L., Gruhn, H., Silber, C., et al. (2020). In situ x-ray diffraction and spectro-microscopic study of ALD protected copper films. ACS Applied Materials and Interfaces, 12(29), 33377-33385. doi:10.1021/acsami.0c06873.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0007-31DF-7 Version Permalink: https://hdl.handle.net/21.11116/0000-0007-31E0-4
Genre: Journal Article

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 Creators:
Dogan, G.1, 2, Author           
Sanli, U. T.1, Author           
Hahn, K.3, Author
Müller, L.2, Author
Gruhn, H.4, Author
Silber, C.2, Author
Schütz, G.1, Author           
Grévent, C.2, Author
Keskinbora, K.1, Author           
Affiliations:
1Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497648              
2Robert Bosch GmbH, Automotive Electronics, 72703 Reutlingen, Germany, ou_persistent22              
3Max Planck Institute for Solid State Research, 70569 Stuttgart, Germany, ou_persistent22              
4Robert Bosch GmbH, Corporate Sector Research and Advance Engineering, 71272 Reutlingen, Germany, ou_persistent22              

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Free keywords: Abt. Schütz
 Abstract: -

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Language(s): eng - English
 Dates: 2020-06-172020-07-22
 Publication Status: Issued
 Pages: 9
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1021/acsami.0c06873
 Degree: -

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Title: ACS Applied Materials and Interfaces
  Other : ACS Applied Materials & Interfaces
  Abbreviation : ACS Appl. Mater. Interfaces
Source Genre: Journal
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Affiliations:
Publ. Info: Washington, DC : American Chemical Society
Pages: - Volume / Issue: 12 (29) Sequence Number: - Start / End Page: 33377 - 33385 Identifier: ISSN: 1944-8244
CoNE: https://pure.mpg.de/cone/journals/resource/1944-8244