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  Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection

Hofmann, S., Lejcek, P., Zhou, G., Yang, H., Lian, S., Kovac, J., et al. (2020). Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection. Journal of Vacuum Science and Technology B, 38(3): 034010. doi:10.1116/6.0000108.

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 Creators:
Hofmann, Siegfried1, Author           
Lejcek, Pavel2, Author
Zhou, Gang3, Author
Yang, Hao4, Author
Lian, SongYou3, Author
Kovac, Janez5, Author
Wang, JiangYong3, Author
Affiliations:
1Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497650              
2Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Praha 8, Czech Republic, ou_persistent22              
3Department of Physics, Shantou University, 243 Daxue Road, Shantou, 515063 Guangdong, China, ou_persistent22              
4Department of Chemistry, Shantou University, 243 Daxue Road, Shantou, 515063 Guangdong, China, ou_persistent22              
5Department of Surface Engineering and Optoelectronics (F4), Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia, ou_persistent22              

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Free keywords: Emeriti and Others
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Language(s): eng - English
 Dates: 2020-04-222020-05
 Publication Status: Issued
 Pages: 6
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1116/6.0000108
 Degree: -

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Title: Journal of Vacuum Science and Technology B
  Other : J. Vac. Sci. Techn. B
  Other : JVST B
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: New York : Published by AVS through the American Institute of Physics
Pages: - Volume / Issue: 38 (3) Sequence Number: 034010 Start / End Page: - Identifier: ISSN: 0734-2101
CoNE: https://pure.mpg.de/cone/journals/resource/954928495416