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  Ultrathin organic films for corrosion protection in microelectronic devices

Stratmann, M., Unger, M., Rohwerder, M., & Lobnig, R. E. (1999). Ultrathin organic films for corrosion protection in microelectronic devices. In R. B. Comizzoli, R. P. Frankenthal, & J. D. Sinclair (Eds.), Corrosion and Reliability of Electronic Materials and Devices, Proceedings (pp. 1-9).

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Item Permalink: https://hdl.handle.net/21.11116/0000-0008-38AC-8 Version Permalink: https://hdl.handle.net/21.11116/0000-0008-38AE-6
Genre: Conference Paper

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 Creators:
Stratmann, Martin1, Author           
Unger, M.1, Author           
Rohwerder, Michael2, Author           
Lobnig, Renate Elfriede1, Author           
Affiliations:
1Institut für Werkstoffwissenschaften IV, Universität Erlangen, Erlangen, D-91058, Germany, ou_persistent22              
2Institut für Werkstoffwissenschaften IV, Universität Erlangen, 91058 Erlangen, Germany, ou_persistent22              

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 Abstract: In view of ever decreasing dimensions in microelectronic devices the
question of how to effectively protect the multilevel interconnections
from corrosion induced malfunctions becomes more and more important. The
possible role of ultrathin organic films lies both in corrosion
protection itself and in adhesion promotion of an additional polymeric
layer for encapsulation. This paper will focus on the modification of
two metals widely used in microelectronic compounds: copper and
aluminium.

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Language(s): eng - English
 Dates: 1999
 Publication Status: Issued
 Pages: -
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 Rev. Type: -
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Title: 4th International Symposium on Corrosion and Reliability of Electronic Materials and Devices
Place of Event: Honolulu, Hawaii
Start-/End Date: 1999-10-17 - 1999-10-22

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Title: Corrosion and Reliability of Electronic Materials and Devices, Proceedings
Source Genre: Proceedings
 Creator(s):
Comizzoli, R. B., Editor
Frankenthal, R. P., Editor
Sinclair, J. D., Editor
Affiliations:
-
Publ. Info: -
Pages: - Volume / Issue: 99 (29) Sequence Number: - Start / End Page: 1 - 9 Identifier: ISBN: 1-56677-252-4

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Title: Electrochemical Society Series
Source Genre: Series
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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: - Identifier: -