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キーワード:
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要旨:
Inner-shell edge profiles for K-, L23- and M45-edges have been calculated by means of Hartree-Slater and hydrogenic wave functions and are compared to experimental data. The experimental differential cross-sections have been obtained by a modified<em>k</em>-factor approach from deconvoluted EEL spectra of binary oxides. The aim is to identify those features that are not predicted by the theories and to get some estimate of the accuracy of quantitative microanalysis by means of EELS.
