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  Stress engineering of boron doped diamond thin films via micro-fabrication

Isa, F., Best, J. P., Marzegalli, A., Albani, M., Compte, C., Kruzic, J. J., et al. (2021). Stress engineering of boron doped diamond thin films via micro-fabrication. APL Materials, 9: 061109. doi:10.1063/5.0051196.

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5.0051196.pdf (Publisher version), 9MB
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2021
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 Creators:
Isa, Fabio1, 2, Author
Best, James P.3, 4, 5, Author              
Marzegalli, Anna6, Author
Albani, Marco7, Author
Compte, Christophe1, Author
Kruzic, Jamie J.3, Author
Bendavid, Avi1, 8, Author
Affiliations:
1CSIRO Manufacturing, 36 Bradfield Road, Lindfield, New South Wales 2070, Australia, ou_persistent22              
2Department of Physics and Astronomy, Macquarie University, Sydney, New South Wales 2109, Australia, ou_persistent22              
3School of Mechanical and Manufacturing Engineering, University of New South Wales (UNSW Sydney), Sydney, NSW 2052, Australia, ou_persistent22              
4Thin Films and Nanostructured Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_3274276              
5Nano-/ Micromechanics of Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863401              
6L-NESS and Dipartimento di Fisica, Politecnico di Milano, via Anzani 42, 22100 Como, Italy, ou_persistent22              
7L-NESS and Department of Materials Science, Università di Milano-Bicocca, via Cozzi 55, 20125 Milano, Italy, ou_persistent22              
8School of Materials Science and Engineering, University of New South Wales (UNSW, Sydney), Sydney, NSW 2052, Australia, ou_persistent22              

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Language(s): eng - English
 Dates: 2021-06-152021
 Publication Status: Published in print
 Pages: 6
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1063/5.0051196
 Degree: -

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Title: APL Materials
  Abbreviation : APL Mater.
Source Genre: Journal
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Pages: - Volume / Issue: 9 Sequence Number: 061109 Start / End Page: - Identifier: CoNE: https://pure.mpg.de/cone/journals/resource/2166-532X