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  Power-efficient silicon nitride thermo-optic phase shifters for visible light

Yong, Z., Chen, H., Luo, X., Govdeli, A., Chua, H., Azadeh, S. S., et al. (2022). Power-efficient silicon nitride thermo-optic phase shifters for visible light. Optics Express, 30(5), 7225-7237. doi:10.1364/OE.448614.

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oe-30-5-7225.pdf (Publisher version), 9MB
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2022
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Optica Publishing Group

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https://doi.org/10.1364/OE.448614 (Publisher version)
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 Creators:
Yong, Zheng1, Author
Chen, Hong1, Author              
Luo, Xianshu2, Author
Govdeli, Alperen1, Author              
Chua, Hongyao2, Author
Azadeh, Saeed S.1, Author              
Stalmashonak, Andrei1, Author              
Lo, Guo-Qiang2, Author
Poon, Joyce K. S.1, Author              
Sacher, Wesley D.1, Author              
Affiliations:
1Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society, ou_3287471              
2External Organizations, ou_persistent22              

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 Abstract: We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. The measured power consumption to achieve a π phase shift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW at wavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters were integrated into Mach-Zehnder interferometer switches, and 10 − 90% rise(fall) times of about 570(590) μs were measured.

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 Dates: 2022-02-17
 Publication Status: Published online
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 Identifiers: DOI: 10.1364/OE.448614
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Title: Optics Express
  Abbreviation : Opt. Express
Source Genre: Journal
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Publ. Info: Washington, DC : Optical Society of America
Pages: - Volume / Issue: 30 (5) Sequence Number: - Start / End Page: 7225 - 7237 Identifier: ISSN: 1094-4087
CoNE: https://pure.mpg.de/cone/journals/resource/954925609918