Two-photon optical beam induced current imaging through the backside of 
integrated circuits

Xu, C.; Denk, Winfried

doi:10.1063/1.119334

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Two-photon optical beam induced current imaging through the backside of integrated circuits

Xu, C., & Denk, W. (1997). Two-photon optical beam induced current imaging through the backside of integrated circuits. Applied Physics Letters, 71(18), 2578-2580. doi:10.1063/1.119334.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000A-09DE-3 Version Permalink: https://hdl.handle.net/21.11116/0000-000A-09DF-2

Genre: Journal Article

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Xu, C., Author
Denk, Winfried¹, Author

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1Bell Laboratories Lucent Technologies, Murray Hill, New Jersey, U. S. A., ou_persistent22

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Free keywords: fluorescence microscopy 2-photon Physics

Abstract: Two-photon optical beam induced current (TOBIC) images were acquired through the polished backsides of integrated circuits. An excitation beam with a photon energy below the band gan can traverse even thick substrates virtually unattenuated. At the focus-and only there-two-photon absorption generates electron-hole pairs very efficiently when using a sub-picosecond light source. An additional advantage of TOBIC is a significant increase in spatial resolution. With high numerical aperture objective lense features smaller than 1 mu m are easily discernible. (C) 1997 American Institute of Physics. [S0003-6951(97)02644-2].

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Language(s): eng - English

Dates: Date issued: 1997

Publication Status: Issued

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Identifiers: Other: WOS:A1997YE50700008
DOI: 10.1063/1.119334
ISSN: 0003-6951

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Title: Applied Physics Letters

Abbreviation : Appl. Phys. Lett.

Source Genre: Journal

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Publ. Info: Melville, NY : American Institute of Physics

Pages: - Volume / Issue: 71 (18) Sequence Number: - Start / End Page: 2578 - 2580 Identifier: ISSN: 0003-6951
CoNE: https://pure.mpg.de/cone/journals/resource/954922836223