Impact of feed gas impurities on N incorporation in SiC deposited in a CVD 
process

Lathiya , Dhruvit

Local TagsRelease HistoryDetailsSummary

Impact of feed gas impurities on N incorporation in SiC deposited in a CVD process

Lathiya, D. (2022). Impact of feed gas impurities on N incorporation in SiC deposited in a CVD process. Master Thesis.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/21.11116/0000-000A-7507-B Version Permalink: https://hdl.handle.net/21.11116/0000-000A-7508-A

Genre: Thesis

Files

show Files

Locators

show

Creators

show

hide

Creators:
Lathiya , Dhruvit ¹, Author
Seidel-Morgenstern, Andreas^{1, 2}, Referee

Affiliations:
1Otto-von-Guericke-Universität Magdeburg, External Organizations, ou_1738156
2Physical and Chemical Foundations of Process Engineering, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society, ou_1738150

Content

show

Details

show

hide

Language(s): eng - English

Dates: Accepted: 2022-02-14

Publication Status: Accepted / In Press

Pages: 55

Publishing info: -

Table of Contents: -

Rev. Type: -

Identifiers: -

Degree: Master

Event

show

Legal Case

show

Project information

show

Source

show