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  Atomic layer deposition of yttrium iron garnet thin films

Lammel, M., Scheffler, D., Pohl, D., Swekis, P., Reitzig, S., Piontek, S., et al. (2022). Atomic layer deposition of yttrium iron garnet thin films. Physical Review Materials, 6(4): 044411, pp. 1-9. doi:10.1103/PhysRevMaterials.6.044411.

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 Creators:
Lammel, M.1, Author
Scheffler, D.1, Author
Pohl, D.1, Author
Swekis, P.2, Author              
Reitzig, S.1, Author
Piontek, S.1, Author
Reichlova, H.1, Author
Schlitz, R.1, Author
Geishendorf, K.1, Author
Siegl, L.1, Author
Rellinghaus, B.1, Author
Eng, L.M.1, Author
Nielsch, K.1, Author
Goennenwein, S.T.B.1, Author
Thomas, A.1, Author
Affiliations:
1External Organizations, ou_persistent22              
2Inorganic Chemistry, Max Planck Institute for Chemical Physics of Solids, Max Planck Society, ou_1863425              

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Free keywords: Aluminum coatings; Aluminum compounds; Atomic layer deposition; Atoms; Hematite; Iron; Magnetism; Nanostructures; Thin films; Yttrium iron garnet, 3-D nanostructures; Atomic-layer deposition; Electronic transport; Magnetic metals; Magnetic nanostructures; Magnetic transport; Magnetization configuration; Thin-films; Three dimensional (3D) shapes; Yttrium iron garnets, Substrates
 Abstract: Magnetic nanostructures with nontrivial three-dimensional (3D) shapes enable complex magnetization configurations and a wide variety of new phenomena. To date predominantly magnetic metals have been considered for nontrivial 3D nanostructures, although the magnetic and electronic transport responses are intertwined in metals. Here we report the first successful fabrication of the magnetic insulator yttrium iron garnet (Y3Fe5O12, YIG) via atomic layer deposition (ALD) and show that conformal coating of 3D objects is possible. We utilize a supercycle approach based on the combination of subnanometer thin layers of the binary systems Fe2O3 and Y2O3 in the correct atomic ratio with a subsequent annealing step for the fabrication of ALD-YIG films on Y3Al5O12 substrates. Our process is robust against typical growth-related deviations, ensuring a good reproducibility. The ALD-YIG thin films exhibit a high crystalline quality as well as magnetic properties comparable to samples obtained by other deposition techniques. We show that the ALD-YIG thin films are conformal. This enables the fabrication of 3D YIG nanostructures once appropriate nonmagnetic, 3D templates are developed. Such 3D YIG structures build the groundwork for the experimental investigation of curvature-induced changes on pure spin currents and magnon transport effects. © 2022 American Physical Society.

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Language(s): eng - English
 Dates: 2022-04-252022-04-25
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1103/PhysRevMaterials.6.044411
BibTex Citekey: Lammel2022
 Degree: -

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Title: Physical Review Materials
  Abbreviation : Phys. Rev. Mater.
Source Genre: Journal
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Publ. Info: College Park, MD : American Physical Society
Pages: - Volume / Issue: 6 (4) Sequence Number: 044411 Start / End Page: 1 - 9 Identifier: ISSN: 2475-9953
CoNE: https://pure.mpg.de/cone/journals/resource/2475-9953