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  3D nanofabrication on complex seed shapes using glancing angle deposition

Hyeon-Ho, J., Mark, A. G., Gibbs, J. G., Reindl, T., Waizmann, U., Weis, J., et al. (2014). 3D nanofabrication on complex seed shapes using glancing angle deposition. In 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 437-440). Piscataway, NJ, USA: ANY PUBLISHER.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000B-06D6-D Version Permalink: https://hdl.handle.net/21.11116/0000-000E-4ADF-5
Genre: Conference Paper

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IEEEIntConfMicroElectroMechSystems_2014_437.pdf (Any fulltext), 3MB
 
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https://ieeexplore.ieee.org/document/6765670 (Any fulltext)
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 Creators:
Hyeon-Ho, Jeong, Author
Mark, Andrew G., Author
Gibbs, John G., Author
Reindl, T., Author
Waizmann, U., Author
Weis, J., Author
Fischer, Peer1, Author                 
Affiliations:
1Max Planck Institute for Medical Research, Max Planck Society, ou_1125545              

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 Abstract: Three-dimensional (3D) fabrication techniques promise new device architectures and enable the integration of more components, but fabricating 3D nanostructures for device applications remains challenging. Recently, we have performed glancing angle deposition (GLAD) upon a nanoscale hexagonal seed array to create a variety of 3D nanoscale objects including multicomponent rods, helices, and zigzags [1]. Here, in an effort to generalize our technique, we present a step-by-step approach to grow 3D nanostructures on more complex nanoseed shapes and configurations than before. This approach allows us to create 3D nanostructures on nanoseeds regardless of seed sizes and shapes.

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Language(s): eng - English
 Dates: 2014-01
 Publication Status: Issued
 Pages: 4
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1109/MEMSYS.2014.6765670
BibTex Citekey: 6765670
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Title: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Event: San Francisco, CA, USA
Start-/End Date: 2014-01-26 - 2014-01-30

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Title: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Source Genre: Proceedings
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Publ. Info: Piscataway, NJ, USA : ANY PUBLISHER
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 437 - 440 Identifier: ISBN: 978-1-4799-3509-3
ISSN: 1084-6999