Concentration of N and P in SIC investigated by time-of-flight secondary ion 
mass spectrometry (TOF-SIMS)

Acartürk, T.; Semmelroth, K.; Pensl, G.; Saddow, S. E.; Starke, U.

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Concentration of N and P in SIC investigated by time-of-flight secondary ion mass spectrometry (TOF-SIMS)

Acartürk, T., Semmelroth, K., Pensl, G., Saddow, S. E., & Starke, U. (2005). Concentration of N and P in SIC investigated by time-of-flight secondary ion mass spectrometry (TOF-SIMS). Materials Science Forum, 483-485, 453-456.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000E-FD0C-9 Version Permalink: https://hdl.handle.net/21.11116/0000-000E-FD0D-8

Genre: Journal Article

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Creators:
Acartürk, T.¹, Author
Semmelroth, K., Author
Pensl, G., Author
Saddow, S. E., Author
Starke, U.¹, Author

Affiliations:
1Scientific Facility Interface Analysis (Ulrich Starke), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370498

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Language(s): eng - English

Dates: Date issued: 2005

Publication Status: Issued

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Identifiers: eDoc: 244368
ISI: 000228549600107

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Title: Materials Science Forum

Source Genre: Journal

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Pages: - Volume / Issue: 483-485 Sequence Number: - Start / End Page: 453 - 456 Identifier: ISSN: 0255-5476