Periodic pillar structures by Si etching of multilayer GeSi/Si islands

Zhong, Z.; Katsaros, G.; Stoffel, M.; Costantini, G.; Kern, K.; Schmidt, O. G.; Jin-Phillipp, N. Y.; Bauer, G.

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Periodic pillar structures by Si etching of multilayer GeSi/Si islands

Zhong, Z., Katsaros, G., Stoffel, M., Costantini, G., Kern, K., Schmidt, O. G., et al. (2005). Periodic pillar structures by Si etching of multilayer GeSi/Si islands. Applied Physics Letters, 87(26): 263102.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000E-FD34-B Version Permalink: https://hdl.handle.net/21.11116/0000-000E-FD35-A

Genre: Journal Article

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Creators:
Zhong, Z.^{1, 2}, Author
Katsaros, G.¹, Author
Stoffel, M.¹, Author
Costantini, G.¹, Author
Kern, K.¹, Author
Schmidt, O. G.^{1, 3, 4, 5}, Author
Jin-Phillipp, N. Y.⁶, Author
Bauer, G., Author

Affiliations:
1Department Nanoscale Science (Klaus Kern), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370481
2Former Research Groups, Max Planck Institute for Solid State Research, Max Planck Society, ou_3370500
3Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society, ou_3370501
4Scientific Facility Nanostructuring Lab (Jürgen Weis), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370499
5Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society, ou_3370504
6Department Physical Chemistry of Solids (Joachim Maier), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370483

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Language(s): eng - English

Dates: Date issued: 2005

Publication Status: Issued

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Identifiers: eDoc: 250414
ISI: 000234338700074

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Title: Applied Physics Letters

Source Genre: Journal

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Pages: - Volume / Issue: 87 (26) Sequence Number: 263102 Start / End Page: - Identifier: -