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  Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

Dogan, G. (2022). Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection. PhD Thesis, Universität Stuttgart, Stuttgart.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000B-74E0-5 Version Permalink: https://hdl.handle.net/21.11116/0000-000B-74E1-4
Genre: Thesis

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http://dx.doi.org/10.18419/opus-12286 (Any fulltext)
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 Creators:
Dogan, G.1, 2, Author           
Affiliations:
1Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497648              
2Universität Stuttgart, ou_persistent22              

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Free keywords: Abt. Schütz
 Abstract: -

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Language(s): eng - English
 Dates: 2022-05-23
 Publication Status: Accepted / In Press
 Pages: VIII, 83
 Publishing info: Stuttgart : Universität Stuttgart
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.18419/opus-12286
URI: http://elib.uni-stuttgart.de/handle/11682/12303
URN: urn:nbn:de:bsz:93-opus-ds-123032
 Degree: PhD

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