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  Method for producing an XUV and X-ray diffractive optic

Sanli, U. T., Ceylan, H., Sitti, M., Schütz, G., & Keskinbora, K.(2019). Method for producing an XUV and X-ray diffractive optic.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000C-15D4-D Version Permalink: https://hdl.handle.net/21.11116/0000-000C-15D5-C
Genre: Patent
Other : Verfahren zur Herstellung einer Röntgen- und Röntgenbeugungsoptik
Other : Procédé de production d'un élément optique de diffraction de rayons X et XUV

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https://worldwide.espacenet.com/patent/search?q=pn%3DEP3537216A1 (Any fulltext)
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Locator:
https://patentscope.wipo.int/search/de/detail.jsf?docId=EP251457487 (Any fulltext)
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 Creators:
Sanli, Umut Tunca1, Author           
Ceylan, Hakan2, Author           
Sitti, Metin2, 3, Author           
Schütz, Gisela1, Author           
Keskinbora, Kahraman1, Author           
Affiliations:
1Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497648              
2Dept. Physical Intelligence, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_2054292              
3Dept. of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA, USA, ou_persistent22              

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Free keywords: Abt. Schütz; Abt. Sitti
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 Dates: 2018-07-092019-09-11
 Publication Status: Published online
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: BibTex Citekey: sanli2020method
Patent Publication Nr.: EP3537216A1
Patent Publication Nr.: EP3537216B1
Patent Application Nr.: PCT/EP2019/053876
Patent Publication Nr.: WO2019170399A1
Patent Publication Nr.: CN111819492A
Patent Publication Nr.: US2020398509A1
 Degree: -

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