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Free keywords:
CRESST
Abstract:
The foreseen upgrade of the CRESST experiment aims to deploy hundreds of detectors equipped with transition-edge sensors (TES). The investigated sputtering process allows for a more reliable and much quicker TES fabrication. This work explains the effect of the process parameters on the Tc as well as some design aspects required to precisely tune the Tc. Thanks to a new approach, it is now possible to produce TESs with unprecedented reproducibility.