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  An Active Visible-Light Integrated Photonics Platform on 200-mm Si

Sacher, W. D., Lin, Y., Chen, H., Azadeh, S. S., Yong, Z., Luo, X., et al. (2023). An Active Visible-Light Integrated Photonics Platform on 200-mm Si. In 2023 Optical Fiber Communications Conference and Exhibition, OFC 2023 - Proceedings. IEEE. doi:10.1364/OFC.2023.Tu3C.5.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000D-5AA5-4 Version Permalink: https://hdl.handle.net/21.11116/0000-000D-5AA6-3
Genre: Conference Paper

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An_Active_Visible-Light_Integrated_Photonics_Platform_on_200-mm_Si.pdf (Preprint), 2MB
 
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https://doi.org/10.1364/OFC.2023.Tu3C.5 (Publisher version)
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 Creators:
Sacher, Wesley David1, Author                 
Lin, Yiding1, Author                 
Chen, Hong1, Author                 
Azadeh, Saeed S.1, Author                 
Yong, Zheng1, Author           
Luo, Xianshu2, Author
Chua, Hongyao2, Author
Mak, Jason C. C.1, Author
Govdeli, Alperen1, Author           
Sharma, Ankita1, Author           
Mikkelsen, Jared C.2, Author
Mu, Xin1, Author           
Stalmashonak, Andrei1, Author           
Lo, Guo-Qiang, Author
Poon, Joyce K. S.1, Author                 
Affiliations:
1Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society, ou_3287471              
2External Organizations, ou_persistent22              

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 Abstract: We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445–640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.

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 Dates: 2023-05-19
 Publication Status: Published online
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 Identifiers: DOI: 10.1364/OFC.2023.Tu3C.5
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Title: Optical Fiber Communications Conference and Exhibition (OFC)
Place of Event: San Diego, CA, USA
Start-/End Date: 2023-05-05 - 2023-05-09

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Title: 2023 Optical Fiber Communications Conference and Exhibition, OFC 2023 - Proceedings
Source Genre: Proceedings
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Publ. Info: IEEE
Pages: - Volume / Issue: - Sequence Number: Tu3C.5 Start / End Page: - Identifier: ISBN: 979-8-3503-1229-4