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  Design and realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments

Schmehl, A., Mairoser, T., Herrnberger, A., Stephanos, C., Meir, S., Förg, B., et al. (2018). Design and realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Nuclear Instruments and Methods in Physics Research A, 883, 170-182.

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 Creators:
Schmehl, A., Author
Mairoser, T., Author
Herrnberger, A., Author
Stephanos, C., Author
Meir, S., Author
Förg, B., Author
Wiedemann, B., Author
Böni, P., Author
Mannhart, J.1, Author           
Kreuzpaintner, W., Author
Affiliations:
1Department Solid State Quantum Electronics (Jochen Mannhart), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370485              

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 Abstract: We report on the realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Starting with the scientific requirements, which define the general design considerations, the external limitations and boundaries imposed by the available space at a neutron beamline and by the neutron and vacuum compatibility of the used materials, are assessed. The relevant aspects are then accounted for in the realization of our highly mobile deposition system, which was designed with a focus on a quick and simple installation and removability at the beamline. Apart from the general design, the in-vacuum components, the auxiliary equipment and the remote control via a computer, as well as relevant safety aspects are presented in detail. (c) 2017 Elsevier B.V. All rights reserved.

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Language(s): eng - English
 Dates: 2018
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Internal
 Identifiers: eDoc: 736068
ISI: 000419216800020
 Degree: -

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Title: Nuclear Instruments and Methods in Physics Research A
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: 883 Sequence Number: - Start / End Page: 170 - 182 Identifier: ISSN: 0168-9002