Formation of Thin Oxide Layer on Surface of Copper Caused by Implantation of 
High-Energy Oxygen Ions

Khaydukov, Y. N.; Soltwedel, O.; Marchenko, Y. A.; Khaidukova, D. Y.; Csik, A.; Acartürk, T.; Starke, U.; Keller, T.; Guglya, A. G.; Kazdayev, K. R.

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Formation of Thin Oxide Layer on Surface of Copper Caused by Implantation of High-Energy Oxygen Ions

Khaydukov, Y. N., Soltwedel, O., Marchenko, Y. A., Khaidukova, D. Y., Csik, A., Acartürk, T., et al. (2017). Formation of Thin Oxide Layer on Surface of Copper Caused by Implantation of High-Energy Oxygen Ions. Journal of Surface Investigation, 11(1), 206-210.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000E-D074-4 Version Permalink: https://hdl.handle.net/21.11116/0000-000E-D075-3

Genre: Journal Article

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Creators:
Khaydukov, Y. N., Author
Soltwedel, O., Author
Marchenko, Y. A., Author
Khaidukova, D. Y., Author
Csik, A., Author
Acartürk, T.¹, Author
Starke, U.¹, Author
Keller, T.², Author
Guglya, A. G., Author
Kazdayev, K. R., Author

Affiliations:
1Scientific Facility Interface Analysis (Ulrich Starke), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370498
2Department Solid State Spectroscopy (Bernhard Keimer), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370480

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Free keywords: neutron X-ray reflectometry; copper oxidation; ion implantation

Abstract: Combination of neutron and X-ray reflectometry was used to study the depth profile of 100 nm thin copper films with implanted oxygen ions with energy E = 10-30 keV and fluencies D = (0.2-5.4) x10(16) cm(-2). The oxygen ion implantation at 30 keV was shown to lead to formation of 3 nm thick layer on the surface. Density and copper-oxygen stoichiometry of the observed surface layer was close to Cu2O oxide. We attribute the Cu2O oxide formation to highly mobilized copper atoms generated by stimulated ion implantation.

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Language(s): eng - English

Dates: Date issued: 2017

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 734821
ISI: 000396389600033

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Title: Journal of Surface Investigation

Source Genre: Journal

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Publ. Info: NEW YORK : MAIK NAUKA/INTERPERIODICA/SPRINGER

Pages: - Volume / Issue: 11 (1) Sequence Number: - Start / End Page: 206 - 210 Identifier: ISSN: 1027-4510