Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up 
during Sputter-Deposition of Nanoscale Silicide Films

Krause, B.; Abadias, G.; Michel, A.; Wochner, P.; Ibrahimkutty, S.; Baumbach, T.

Local TagsRelease HistoryDetailsSummary

Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films

Krause, B., Abadias, G., Michel, A., Wochner, P., Ibrahimkutty, S., & Baumbach, T. (2016). Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films. ACS Applied Materials & Interfaces, 8(50), 34888-34895.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/21.11116/0000-000E-D082-3 Version Permalink: https://hdl.handle.net/21.11116/0000-000E-D083-2

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Krause, B., Author
Abadias, G., Author
Michel, A., Author
Wochner, P.¹, Author
Ibrahimkutty, S., Author
Baumbach, T., Author

Affiliations:
1Department Solid State Spectroscopy (Bernhard Keimer), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370480

Content

show

Details

show

hide

Language(s): eng - English

Dates: Date issued: 2016

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: Internal

Identifiers: eDoc: 723625
ISI: 000390728900083

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: ACS Applied Materials & Interfaces

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: -

Pages: - Volume / Issue: 8 (50) Sequence Number: - Start / End Page: 34888 - 34895 Identifier: ISSN: 1944-8244