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  A Comprehensive Study of Hydrogen Etching on the Major SiC Polytypes and Crystal Orientations

Frewin, C. L., Coletti, C., Riedl, C., Starke, U., & Saddow, S. E. (2009). A Comprehensive Study of Hydrogen Etching on the Major SiC Polytypes and Crystal Orientations. SILICON CARBIDE AND RELATED MATERIALS 2008, 589-592.

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 Creators:
Frewin, C. L., Author
Coletti, C.1, Author           
Riedl, C.1, Author           
Starke, U.1, Author           
Saddow, S. E., Author
Affiliations:
1Scientific Facility Interface Analysis (Ulrich Starke), Max Planck Institute for Solid State Research, Max Planck Society, ou_3370498              

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Language(s): eng - English
 Dates: 2009
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 450357
ISI: 000265961100142
 Degree: -

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Title: SILICON CARBIDE AND RELATED MATERIALS 2008
Source Genre: Issue
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Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 589 - 592 Identifier: -

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Title: Materials Science Forum
Source Genre: Journal
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Pages: - Volume / Issue: 615-617 Sequence Number: - Start / End Page: - Identifier: ISSN: 0255-5476