Influence of fitting algorithms on thickness determination during monitoring of 
optical coatings

Melzig, Thomas; Amochkina, Tatiana; Bruns, Stefan; Henning, Philipp; Terhuerne, Joerg; Trubetskov, Michael K.; Vergoehl, Michael

doi:10.1016/j.surfcoat.2023.130197

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Influence of fitting algorithms on thickness determination during monitoring of optical coatings

Melzig, T., Amochkina, T., Bruns, S., Henning, P., Terhuerne, J., Trubetskov, M. K., et al. (2024). Influence of fitting algorithms on thickness determination during monitoring of optical coatings. Surface and Coatings Technology, 476: 130197. doi:10.1016/j.surfcoat.2023.130197.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000E-4241-E Version Permalink: https://hdl.handle.net/21.11116/0000-000E-4242-D

Genre: Journal Article

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Creators:
Melzig, Thomas¹, Author
Amochkina, Tatiana¹, Author
Bruns, Stefan¹, Author
Henning, Philipp¹, Author
Terhuerne, Joerg¹, Author
Trubetskov, Michael K.², Author
Vergoehl, Michael¹, Author

Affiliations:
1external, ou_persistent22
2Laboratory for Attosecond Physics, Max Planck Institute of Quantum Optics, Max Planck Society, ou_1445564

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Language(s): eng - English

Dates: Submitted: 2023-09-01Accepted: 2023-11-11Published Online: 2023-11-17Date issued: 2024-01-30

Publication Status: Issued

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Rev. Type: Peer

Identifiers: DOI: 10.1016/j.surfcoat.2023.130197
Other: 6486

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Project name : EPIC-Lens (FKZ 13N14583)

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Funding organization : German Federal Ministry of Education and Research (BMBF)

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Title: Surface and Coatings Technology

Abbreviation : Surf. Coat. Tech.

Source Genre: Journal

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Publ. Info: Lausanne : Elsevier

Pages: - Volume / Issue: 476 Sequence Number: 130197 Start / End Page: - Identifier: ISSN: 0257-8972
CoNE: https://pure.mpg.de/cone/journals/resource/954925496044