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  KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as adsorbate precursor.

Foulon, F., & Stuke, M. (1993). KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as adsorbate precursor. Applied Physics Letters, 62(18), 2173-2175.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0013-0765-F Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0027-E023-3
Genre: Journal Article

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 Creators:
Foulon, F., Author
Stuke, M.1, Author              
Affiliations:
1Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society, ou_578609              

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Language(s): eng - English
 Dates: 1993-05-03
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: eDoc: 276304
ISI: A1993LA00200007
 Degree: -

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Title: Applied Physics Letters
  Alternative Title : Appl. Phys. Lett.
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 62 (18) Sequence Number: - Start / End Page: 2173 - 2175 Identifier: ISSN: 0003-6951