Argon-ion laser direct-write Al deposition from trialkylamine alane precursors.

Foulon, F.; Stuke, M.

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Argon-ion laser direct-write Al deposition from trialkylamine alane precursors.

Foulon, F., & Stuke, M. (1993). Argon-ion laser direct-write Al deposition from trialkylamine alane precursors. Applied Physics A-Materials Science & Processing, 56(3), 283-289.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0013-07DC-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-E030-5

Genre: Journal Article

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Creators:
Foulon, F., Author
Stuke, M.¹, Author

Affiliations:
1Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society, ou_578609

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Language(s): eng - English

Dates: Date issued: 1993-03

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 276305
ISI: A1993KQ32000021

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Title: Applied Physics A-Materials Science & Processing

Alternative Title : Appl. Phys. A-Mater. Sci. Process.

Source Genre: Journal

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Pages: - Volume / Issue: 56 (3) Sequence Number: - Start / End Page: 283 - 289 Identifier: ISSN: 0947-8396