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  Excimer laser projection-patterned deposition of Al via photolytically driven decomposition of trialkylamine alane as adsorbate precursor.

Foulon, F., & Stuke, M. (1993). Excimer laser projection-patterned deposition of Al via photolytically driven decomposition of trialkylamine alane as adsorbate precursor. Applied Physics A-Materials Science & Processing, 56(3), 267-273.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0013-07DE-3 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0027-E04B-B
Genre: Journal Article

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 Creators:
Foulon, F., Author
Stuke, M.1, Author              
Affiliations:
1Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society, ou_578609              

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Language(s): eng - English
 Dates: 1993-03
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: eDoc: 276306
ISI: A1993KQ32000019
 Degree: -

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Title: Applied Physics A-Materials Science & Processing
  Alternative Title : Appl. Phys. A-Mater. Sci. Process.
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 56 (3) Sequence Number: - Start / End Page: 267 - 273 Identifier: ISSN: 0947-8396