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Stainless steel; Microstructures; Microfabrication; Electrochemistry; Short voltage pulses
Abstract:
Application of ultrashort voltage pulses to a tiny tool electrode under suitable electrochemical conditions enables precise three-dimensional machining of stainless steel. In order to reach submicrometer precision and high processing speed, the formation of a passive layer on the workpiece surface during the machining process has to be prevented by proper choice of the electrolyte. Mixtures of concentrated hydrofluoric and hydrochloric acid are well suited in this respect and allow the automated machining of complicated three-dimensional microelements. The dependence of the machining precision on pulse duration and pulse amplitude was investigated in detail.
