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  Bonding and morphology study of carbon nitride films obtained by dual ion beam sputtering

Quirós, C., Prieto, P., Fernandez, A., Elizalde, E., Mornt, C., Schlögl, R., et al. (2000). Bonding and morphology study of carbon nitride films obtained by dual ion beam sputtering. Journal of Vacuum Science and Technology. A, 18(2), 515-523. doi:10.1116/1.582218.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0011-1B95-B Version Permalink: https://hdl.handle.net/21.11116/0000-0006-5007-8
Genre: Journal Article

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1.582218.pdf (Publisher version), 821KB
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2000
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 Creators:
Quirós, C., Author
Prieto, P., Author
Fernandez, A., Author
Elizalde, E., Author
Mornt, C., Author
Schlögl, Robert1, Author           
Spillecke, Otto1, Author           
Sanz, J. M., Author
Affiliations:
1Inorganic Chemistry, Fritz Haber Institute, Max Planck Society, ou_24023              

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Free keywords: 21
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Language(s): eng - English
 Dates: 1999-08-061999-11-262000-03-032000-03
 Publication Status: Issued
 Pages: 9
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 1329
DOI: 10.1116/1.582218
 Degree: -

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Title: Journal of Vacuum Science and Technology. A
Source Genre: Journal
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Publ. Info: New York : Published by AVS through the American Institute of Physics
Pages: 9 Volume / Issue: 18 (2) Sequence Number: - Start / End Page: 515 - 523 Identifier: ISSN: 0734-2101
CoNE: https://pure.mpg.de/cone/journals/resource/954928495416_1