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  Particle growth in hydrogen–methane plasmas

Shimizu, T., Jacob, W., Thomas, H., Morfill, G., Abe, T., Watanabe, Y., et al. (2006). Particle growth in hydrogen–methane plasmas. Thin Solid Films, 506, 652-655.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0011-D442-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0011-D443-C
Genre: Conference Paper

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 Creators:
Shimizu, T.1, Author           
Jacob, W., Author
Thomas, H.1, Author           
Morfill, G.1, Author           
Abe, T., Author
Watanabe, Y., Author
Sato, N., Author
Affiliations:
1Theory and Complex Plasmas, MPI for Extraterrestrial Physics, Max Planck Society, ou_159894              

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Language(s): eng - English
 Dates: 2006-05-26
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 275508
DOI: 10.1016/j.tsf.2005.08.059
Other: 275508
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Title: The Joint Meeting of 7th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 17th SPSM (Symposium on Plasma Science for Materials) - 7th APCPST/17th SPSM
Place of Event: Fukuoka, Japan
Start-/End Date: 2004-06-29 - 2004-07-02

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Title: Thin Solid Films
Source Genre: Journal
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Pages: - Volume / Issue: 506 Sequence Number: - Start / End Page: 652 - 655 Identifier: ISSN: 0040-6090