Atomistic Simulation of Silicon Bombardment by Energetic CF3+: Product 
Distribution and Energies

Abrams, C. F.; Graves, D. B.

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Atomistic Simulation of Silicon Bombardment by Energetic CF₃⁺: Product Distribution and Energies

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Abrams, C. F.
MPI for Polymer Research, Max Planck Society;

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Abrams, C. F., & Graves, D. B. (2000). Atomistic Simulation of Silicon Bombardment by Energetic CF₃⁺: Product Distribution and Energies. Thin Solid Films, 374, 150-156.

Cite as: https://hdl.handle.net/11858/00-001M-0000-000F-6A24-2

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