Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods

Chifen, A. N.; Knoll, Wolfgang; Förch, Renate

doi:10.1016/j.matlet.2006.07.118

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Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods

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Chifen, A. N.
MPI for Polymer Research, Max Planck Society;

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Knoll, Wolfgang
MPI for Polymer Research, Max Planck Society;

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Förch, Renate
MPI for Polymer Research, Max Planck Society;

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Chifen, A. N., Knoll, W., & Förch, R. (2007). Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods. Materials Letters, 61(8-9), 1722-1724. doi:10.1016/j.matlet.2006.07.118.

Cite as: https://hdl.handle.net/11858/00-001M-0000-000F-7CC8-1

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