Surface stress control using ultraviolet light irradiation of 
plasma-polymerized thin films

Igarashi, S.; Itakura, A. N.; Kitajima, M.; Chifen, A. N.; Förch, Renate; Berger, Rüdiger

doi:10.1063/1.2183807

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Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films

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Chifen, A. N.
MPI for Polymer Research, Max Planck Society;

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Förch, Renate
MPI for Polymer Research, Max Planck Society;

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Berger, Rüdiger
MPI for Polymer Research, Max Planck Society;

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Igarashi, S., Itakura, A. N., Kitajima, M., Chifen, A. N., Förch, R., & Berger, R. (2006). Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films. Applied Physics Letters, 88(14): 143119. doi:10.1063/1.2183807.

Cite as: https://hdl.handle.net/11858/00-001M-0000-000F-7F74-9

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