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Obtaining different orientation relationships for Cu Films grown on (0001) α-Al2O3 substrates by magnetron sputtering

MPS-Authors
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Dehm,  G.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Edongue,  H.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Wagner,  T.
Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Oh,  S.-H.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Dehm, G., Edongue, H., Wagner, T., Oh, S.-H., & Arzt, E. (2005). Obtaining different orientation relationships for Cu Films grown on (0001) α-Al2O3 substrates by magnetron sputtering. Zeitschrift für Metallunde, 96, 249-254.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-27EA-0
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