X-ray microdiffraction: Local stress distribution in polycrystalline and 
epitaxial thin films

Phillips, M. A.; Spolenak, R.; Tamura, N.; Brown, W. L.; MacDowell, A. A.; Celestre, R. C.; Padmore, H. A.; Batterman, B. W.; Arzt, E.; Patel, J. R.

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X-ray microdiffraction: Local stress distribution in polycrystalline and epitaxial thin films

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Phillips, M. A.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Spolenak, R.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt, E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Phillips, M. A., Spolenak, R., Tamura, N., Brown, W. L., MacDowell, A. A., Celestre, R. C., et al. (2004). X-ray microdiffraction: Local stress distribution in polycrystalline and epitaxial thin films. Microelectronic Engineering, 75, 117-126.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-2976-4

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