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Layered nanostructures for the determination of physical parameters in sputter depth profiling

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2004). Layered nanostructures for the determination of physical parameters in sputter depth profiling. In Proceedings of the First International Symposium on Standard Materials and Metrology for Nanotechnology (SMAM 1) (pp. 20-27).


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2BCF-C
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