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Analysis of local strain in aluminum interconnects by convergent beam electron diffraction

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Krämer,  S.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Volkert,  C. A.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mayer,  J.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Krämer, S., Volkert, C. A., & Mayer, J. (2003). Analysis of local strain in aluminum interconnects by convergent beam electron diffraction. Microscopy and Microanalysis, 9(5), 390-398.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2C3C-0
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