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Progress in quantitative sputter depth profiling using the MRI-model

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Wang,  J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., & Wang, J. Y. (2003). Progress in quantitative sputter depth profiling using the MRI-model. Journal of Surface Analysis, 10, 52-57.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2D53-0
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