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AES depth profiling of thermally treated Al/Si thin-film structures

MPS-Authors
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Wang,  J.Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Zhao,  Y.H.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer,  E.J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Citation

Zalar, A., Wang, J., Zhao, Y., Mittemeijer, E., & Panjan, P. (2003). AES depth profiling of thermally treated Al/Si thin-film structures. Vacuum, 71, 11-17.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2D73-8
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