Interconnects for Microelectronics

Spolenak, R.; Zschech, E.

Item

ITEM ACTIONSEXPORT

Add to Basket

Local TagsRelease HistoryDetailsSummary

Released

Book Chapter

Interconnects for Microelectronics

MPS-Authors

/persons/resource/persons76138

Spolenak, R.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

External Resource

No external resources are shared

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

Fulltext (public)

There are no public fulltexts stored in PuRe

Supplementary Material (public)

There is no public supplementary material available

Citation

Spolenak, R., & Zschech, E. (2003). Interconnects for Microelectronics. In K. Wetzig, & C. M. Schneider (Eds.), Metal Based Thin Films for Electronics (pp. 7-24). Weinheim: Wiley-VCH.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-2E19-C

Abstract

There is no abstract available