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Quantitative evaluation of sputtering induced surface roughness in depth profiling of polycrystalline multilayers using auger electron spectroscopy

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Wang,  J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer,  E. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Wang, J. Y., Hofmann, S., Zalar, A., & Mittemeijer, E. J. (2003). Quantitative evaluation of sputtering induced surface roughness in depth profiling of polycrystalline multilayers using auger electron spectroscopy. Thin Solid Films, 444, 120-124.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2F04-5
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