Improvement of the depth resolution in sputter depth profiling by elastic peak 
electron spectroscopy

Kesler, V.; Hofmann, S.

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Improvement of the depth resolution in sputter depth profiling by elastic peak electron spectroscopy

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Hofmann, S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Kesler, V., & Hofmann, S. (2002). Improvement of the depth resolution in sputter depth profiling by elastic peak electron spectroscopy. Surface and Interface Analysis, 33(8), 635-639.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3054-C

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