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3-D focused ion beam mapping of nanoindentation zones in a Cu- Ti multilayered coating

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Kraft,  O.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Wagner,  T.
Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Steer, T. J., Möbus, G., Kraft, O., Wagner, T., & Inkson, B. J. (2002). 3-D focused ion beam mapping of nanoindentation zones in a Cu- Ti multilayered coating. Thin Solid Films, 413(1-2), 147-154.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-30B0-9
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