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Determination of the depth scale in sputter depth profiling (The sputtered depth in depth profiling)

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Wang,  J.Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., & Wang, J. (2002). Determination of the depth scale in sputter depth profiling (The sputtered depth in depth profiling). Journal of Surface Analysis, 9, 306-309.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-3354-1
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