The role of delocalized nitrogen in determining the local atomic arrangement 
and mechanical properties of amorphous carbon nitride thin films

Holloway, B. C.; Kraft, O.; Shuh, D. K.; Nix, W. D.; Kelly, M.; Pianetta, P.; Hagström, S.

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The role of delocalized nitrogen in determining the local atomic arrangement and mechanical properties of amorphous carbon nitride thin films

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Kraft, O.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Holloway, B. C., Kraft, O., Shuh, D. K., Nix, W. D., Kelly, M., Pianetta, P., et al. (2000). The role of delocalized nitrogen in determining the local atomic arrangement and mechanical properties of amorphous carbon nitride thin films. Journal of Vacuum Science and Technology A, 18, 2964-2971.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-38C2-E

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