Ultimate depth resolution and profile reconstruction in sputter profiling with 
AES and SIMS

Hofmann, S.

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Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS

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Hofmann, S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2000). Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS. Surface and Interface Analysis, 30, 228-233.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3903-5

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